Measurement of Hydrofluoric Acid and
Water Content in Etching Solutions Using
AOTF-NIR Spectroscopy
Abstract:
A Brimrose AOTF-NIR Luminar
spectrometer was used to scan
spectral data on etching solutions
with varying amounts of hydrofluoric
acid and water content. There were
clear and discernible spectral
differences as the hydrofluoric acid
and water content changed. The
modeling showed that the Brimrose
AOTF-NIR spectrometer can accurately
predict values for hydrofluoric acid
and water in etching solutions.
